Effect of magnetism of specimen on energy spectrum analysis

摘要：

　　With This paper studies the effect to the result of energy spectrum analysis by the magnetic specimen.The electron beam and the interaction between electronics and solid in magnetic field had been discussed,and the escape depth of two elements characteristic X-ray had been calculated.From the above that the mechanism and principle of this specimens energy spectrum analysis result of error had been confirmed,and coincides with the experimental result.The study result provides an important reference for the analysis worker.

关键词： magnetic specimen energy spectrum analysis deviation mechanism

作者: Yan Yao Shengxiang Bao Zheng Yuwei

作者单位: State Key Laboratory of Electronic Thin Films and Integrated Devices University of Electronic Science and Technology of China,Chengdu,China

会议类型: 国际会议

会议名称: The 15th International Conference on Electronic Packaging Technology (ICEPT 2014) ) (第十五届电子封装技术国际会议)

会议地点: 成都

会议语种:英文

页码: 996-1000

在线出版日期: 2014-08-12（万方平台首次上网日期，不代表论文的发表时间）