Higher-order Ring Resonators and Delayed Interferometers Based on 300-mm SOI Technology for WDM Applications

摘要：

　　We introduce high-performance Si-nanowire WDM devices based on higher-order coupled resonator optical waveguides (CROW) and multi-stage delayed Mach-Zehnder interferometers (DMZI) fabricated by 300-mm SOI wafer-scale ArF-immersion lithography process. For the two kinds of WDM devices, we experimentally demonstrate low insertion loss, spectral flatness and low crosstalk properties, together with high manufacturing tolerances.

作者: Seok-Hwan Jeong Yu Tanaka Ken Morito

作者单位: Photonics Electronics Technology Research Association (PETRA)AIST West-7SCR, 16-1 Onogawa, Tsukuba, Ibaraki 305-8569, Japan

会议类型: 国际会议

会议名称: Progress in Electromagnetics Research Symposium 2014(2014年电磁学研究新进展学术研讨会)

会议地点: 广州

会议语种:英文

页码: 374-377

在线出版日期: 2014-08-01（万方平台首次上网日期，不代表论文的发表时间）