Electrical Lumped Model for Implemented RF-MEMS Capacitive Switch on Semi-suspended Coplanar-waveguide

摘要：

　　A novel electrical lumped model for an RF MEMS capacitive switch which is implemented on a semi-suspended coplanar-waveguide is proposed and studied.The quality factor is mathematically studied taking the effects of air-gaps and substrate resistance into consideration.Results indicate that increasing the equivalent resistance of transmitting line and the switch,series resistance,in down-state has negative effect and can considerably decrease the quality factor.Increasing the capacitance of the switch also has a negative effect on the quality factor.Increasing the substrate resistance improves the quality factor.Lower capacitance can allow the switch to operate with a wider bandwidth of high quality factors and larger capacitance can make the bandwidth narrower.

作者: Amin Khalili Moghaddam Joon Huang Chuah Harikrishnan A/L Ramiah

作者单位: Department of Electrical Engineering,University of Malaya,Kuala Lumpur 50603,Malaysia

会议类型: 国际会议

会议名称: Progress in Electromagnetics Research Symposium 2014(2014年电磁学研究新进展学术研讨会)

会议地点: 广州

会议语种:英文

页码: 482-486

在线出版日期: 2014-08-01（万方平台首次上网日期，不代表论文的发表时间）