A MZI Based Integrated Optical Accelerometer

摘要：

　　We demonstrate an optical accelerometer based on geometrically asymmetric Mach Zehnder interferometer which is proposed to be fabricated on a flexible substrate. The asymmetric MZI based device made by polymer waveguides and substrate to realize the elastic property with a double arms cantilever beam. The relation between the structure parameters and the sensitivity are analyzed. A prototype is fabricated and a detecting experiment scheme designed for this flexible optical accelerometer is proposed. Due to simplicity of the structure, the sensor is suitable for mass production.

作者: Wei Hu Guang Qian Ruo-Zhou Li Feng-Hua Wan Jie Tang Tong Zhang

作者单位: School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China;Key Labora School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China;Key Labora School of Electronic Science and Engineering, Southeast University, China;Key Laboratory of Micro-In School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China;School of

会议类型: 国际会议

会议名称: Progress in Electromagnetics Research Symposium 2014(2014年电磁学研究新进展学术研讨会)

会议地点: 广州

会议语种:英文

页码: 1272-1276

在线出版日期: 2014-08-01（万方平台首次上网日期，不代表论文的发表时间）