Microwave Plasma Reactor Based on Microwave Oven
In this paper,a simple compact size microwave plasma reactor(MPR)based on 2.45 GHz 700 W home used microwave oven has been design and constructed for use in laboratory.Main design criteria were low cost and available of parts and components in home country,in order to make it easy to use,to repair,to move and no leak of microwave radiation.This system consist of reactor vessel,mini air pump and solution container with heater.The reactor vessel is made from 800 ml Pyrex beaker with two pipes mounted on the aluminum cover plate of vessel for injection and exhaust gas.The quarter wavelength electrode unit consisting of five tungsten rods is placed on a circular aluminum plate with diameter λ/2 for used to generating plasma.Currently the microwave plasma reactor built is being used to be microwave plasma chemical vapor deposition system(MPCVD).However,such a system can easily be adapted to serve as surface cleaner of substrate.The fabricated system is used to test the produce carbon nanoparticle from ethanol vapor and treatment of hydrophobic glass by measuring in contact angle with water drops.
R.Pongsopon T.Chim-Oye M.Fuangfoong
Department of Physics,Faculty of Science and Technology Thammasat University,Rangsit Center,Pathum Thani 12120,Thailand
国际会议
Progress in Electromagnetics Research Symposium 2014(2014年电磁学研究新进展学术研讨会)
广州
英文
2723-2726
2014-08-01（万方平台首次上网日期，不代表论文的发表时间）