Optimized laser beam widths meter calibration system:precisely positioning of detector measurement plane

摘要：

　　The direct substitution method is used in the laser beam widths meter(usually the laser beam profiler)calibration.The laser beam widths measurement results of device under test(DUT)are compared with those made by the laboratory standard.For most laser beam widths meter,the detector measurement plane is installed inside detector head,so it is difficult to accurately position the measurement plane for both standard and DUT.Depending on the ocular estimation,the difference of measurement plane between standard and DUT is usually controlled within 5mm.For 2.5mrad divergence angle of laser beam,5mm tolerance will cause an uncertainty of 12.5μm in the beam widths measurement.In the optimized calibration system,a wedge prism placed in the beam path produces a precise beam deflection,which results in the laser spot displacement on the measurement plane.Depending on the measurable displacement of beam centroid position and the beam deflection angle,the distance from the wedge prism to the detector measurement plane is determined.The experimental results show that using the measurement plane positioning method,the difference of measurement plane between standard and DUT is close to 80μm,only contributing an uncertainty of 0.125μm in final result with the same 2.5mrad beam divergence angle.In additional,some factors affecting precisely positioning of measurement plane are analyzed in this paper.

关键词： Metrology calibration laser beam widths laser beam profile positioning of measurement plane wedge prism laser beam centroid CCD

作者: Wang Yanping Wang Qianqian Ma Chong

作者单位: School of Optoelectronics,Beijing Institute of Technology,5 South Zhongguancun Street,Haidian Distri School of Optoelectronics,Beijing Institute of Technology,5 South Zhongguancun Street,Haidian Distri Dvision of Optics,National Institute of Metrology,18 Bei San Huan Dong Lu,Chaoyang District,Beijing,

会议类型: 国际会议

会议名称: 2013 International Conference on Optical Instrument and Technology (OIT’2013)(2013年光学仪器与技术国际会议)

会议地点: 北京

会议语种:英文

页码: 1-6

在线出版日期: 2013-11-17（万方平台首次上网日期，不代表论文的发表时间）