Groove profile modification of convex blazed gratings by dip(spin)coating with photoresist

摘要：

　　The Offner-like spectrometer,one most widely used hyperspectral imaging spectrometers,offers some advantages over other spectrometers used in pushbroom imaging spectrometry: low chromatic aberrations,a compact size with low optical distortion,and large numerical aperture.The standard Offner spectrometer is made of three spherical concentric elements--two concave mirrors and one convex grating.Convex grating is the core part of Offner type hyper-spectral imager.Considering the difficulties in fabrication of small angles convex gratings by traditional ways,we propose a new method.The ion-beam-etching holographic grating is adopted to obtain the convex blazed gratings with blazed angle of 4°--5°,whose angle can be further reduced by dipping or spinning coating with hardenable liquids.A highly reproducible blaze angle reduction to as high as a factor of 3 is achieved by controlling the spinning speed and viscosity of solution.The precise control of the blaze angles and groove profiles will be further studied focusing on the designing of rotate dip equipment and optimization of pulling speed and viscosity of solution.

关键词： offner-like spectrometer convex grating blaze angle dip (spin)-coating

作者: Yu CHENG Quan LIU Jianhong WU

作者单位: Institute of Information Optical Engineering,Soochow University,Suzhou,China,215006 Institute of Information Optical Engineering,Soochow University,Suzhou,China,215006;Jiangsu Province

会议类型: 国际会议

会议名称: 2013 International Conference on Optical Instrument and Technology (OIT’2013)(2013年光学仪器与技术国际会议)

会议地点: 北京

会议语种:英文

页码: 1-9

在线出版日期: 2013-11-17（万方平台首次上网日期，不代表论文的发表时间）