Laser alchemy:direct writing of multifunctional components in a glass chip with femtosecond laser pulses

摘要：

　　Recently,hybrid integration of multifunctional micro-components for creating complex,intelligent micro/nano systems has attracted significant attention.These micro-/nano-systems have important applications in a variety of areas,such as healthcare,environment,communication,national security,and so on.However,fabrication of micro/nano systems incorporated with different functions is still a challenging task,which generally requires fabrication of discrete microcomponents beforehand followed by assembly and packaging procedures.Furthermore,current micro-/nano-fabrication techniques are mainly based on the well-established planar lithographic approach,which suffer from severe issues in producing three dimensional(3D)structures with complex geometries and arbitrary configurations.In recent years,the rapid development of femtosecond laser machining technology has enabled 3D direct fabrication and integration of multifunctional components,such as microfluidics,microoptics,micromechanics,microelectronics,etc.,into single substrates.In this invited talk,we present our recent progress in this active area.Particularly,we focus on fabrication of 3D micro-and nanofluidic devices and 3D high-Q microcavities in glass substrates by femtosecond laser direct writing.

关键词： femtosecond laser direct writing three dimensional microfluidics and nanofluidics microcavity

作者: Yang Liao Jintian Lin Ya Cheng

作者单位: State Key Laboratory of High Field Laser Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,P.O.Box 800-211,Shanghai 201800,China

会议类型: 国际会议

会议名称: 2013 International Conference on Optical Instrument and Technology (OIT’2013)(2013年光学仪器与技术国际会议)

会议地点: 北京

会议语种:英文

页码: 1-14

在线出版日期: 2013-11-17（万方平台首次上网日期，不代表论文的发表时间）