Effects of Residual Stress on Assembled SAW Strain Sensors
In this paper,the effects of residual stress on SAW strain sensors due to the assembly process are analyzed.SAW strain sensors are mounted with different adhesives and the sensors response is evaluated with the measured scattering parameters S11.Sensors deformation is investigated using a With-Light-Interferometry approach,and compared with the simulations.Additionally,the temperature dependency of the SAW strain sensors is analyzed before and after the assembly.Finally,a thermal aging step is performed and the sensor response and its deformation are evaluated.
J.Hempel J.Wilde L.M.Reindl
Laboratory for Electrical Instrumentation Department of Microsystems Engineering,IMTEK University of Laboratory for Assembly and Packaging Technology Department of Microsystem Engineering,IMTEK Univers
国际会议
Progress in Electromagnetics Research Symposium 2013(2013年电磁学研究新进展学术研讨会)
台北
英文
286-290
2013-03-01（万方平台首次上网日期，不代表论文的发表时间）