Research on DLC Thin Films Deposited on Different Substrates Based on LIS

摘要：

　　Diamond-like carbon(DLC)thin films were deposited on YG6 cemented carbide,SKD11 stainless steel and T7451 aluminium alloy by linear ion source(LIS).Surface morphology and microstructure of the thin films were studied by Stylus Profiler,atomic force microscope(AFM)and Raman spectrum.Mechanical properties of the thin films,in terms of hardness and film-substrate cohesion were analyzed by scratch tester and Vickers hardness tester.The results showed that the surface was smooth and had low roughness of Ra 5.5nm.The ID/IG ratio of DLC/Cr/SKD11 was less than that of DLC/Cr/YG6 and DLC/Cr/T7451 which meant highest fraction of sp3C.The film-substrate cohesion of DLC/Cr/YG6 film was higher than DLC/Cr/SKD11 and DLC/Cr/T7451 films.The hardness of DLC/Cr/YG6 film was found about 23.5GPa,better than the other two films.

关键词： Linear Ion Source DLC Microstructure Properties

作者: Lei HUANG Juntang YUAN Zhenhua WANG Tao ZHOU

作者单位: School of Mechanical Engineering,Nanjing University of Science and Technology,Nanjing,P.R.China

会议类型: 国际会议

会议名称: The 5th International Conference on Mechanical Engineering and Mechanics(第五届国际机械工程与力学会议)

会议地点: 江苏扬州

会议语种:英文

页码: 315-318

在线出版日期: 2014-08-21（万方平台首次上网日期，不代表论文的发表时间）