The Stiffness Analysis of Micro Spring Based on MEMS Technology

摘要：

　　The oblate O-shaped spring is a new model of micro spring.The spring has two columns.The paper reveals the springs structure and establishes its mechanics analysis model.The calculation formula for the spring constant was derived by Hookes law and Cards second law.The results of the ANSYS finite element simulation show that their relative errors are less than 6%.According to the calculation formula of “S-shaped spring mentioned by reference 6,on the condition of the same dimension and material,the paper illustrates the difference between two shapes of spring about their stiffness.The paper shows the results that the oblate O-shaped spring has larger stiffness.At last,the paper analyzes the reason why the oblate O-shaped spring has larger stiffness.

关键词： MEMS Micro Spring Stiffness Analysis Simulation

作者: Anda XU Zhanwen XI Weirong NIE

作者单位: School of Mechanical Engineering,Nanjing University Of Science and Technology,Nanjing,P.R.China

会议类型: 国际会议

会议名称: The 5th International Conference on Mechanical Engineering and Mechanics(第五届国际机械工程与力学会议)

会议地点: 江苏扬州

会议语种:英文

页码: 538-542

在线出版日期: 2014-08-21（万方平台首次上网日期，不代表论文的发表时间）