Design and Simulation of a Novel Inertial Switch with Arc Cantilever
In order to solve the problems of short contacting time and weak ability under high impact of the existing MEMS inertial switch,based on the manufacture of MEMS,a micro switch with prevented blocks is designed.The switch consists of a suspended circle proof mass as movable electrode,cantilever beams as radial fixed electrode,a circle loop as axial electrode and eight prevented blocks.The cantilever beams can realize the elastic contact when the proof mass impacted on radial electrode and prolong the contact time.the maximum displacement is limited by the prevented blocks,so the switch can bear the certain extent high shock.The results illustrate that the switch-on time is more than 40us when half-sine wave shock acceleration with amplitude 450g impulse width 1ms is applied to the switch.And under a 20000g high shock,the switch also can work without damage.
Inertial Switch,Contact Time,MEMS,High Shock
Pingxin YU Zhanwen XI Weirong NIE Yun CAO
School of mechanical Engineering,Nanjing University of Science and Technology,Nanjing 210094,China
国际会议
The 5th International Conference on Mechanical Engineering and Mechanics(第五届国际机械工程与力学会议)
江苏扬州
英文
543-547
2014-08-21(万方平台首次上网日期,不代表论文的发表时间)