Design & Simulation of a MEMS Electro-thermal Actuator Based on Fluid Thermal Expansion

摘要：

　　In this paper a new kind of MEMS electro-thermal actuator based on fluid thermal expansion is introduced,modeled and simulated.The temperature rise of traditional thermal actuators is too high to achieve large displacement output.And the anchors of the actuators are very easy to fail under high temperature.To solve this problem,an electro-thermal actuator with fluid as the thermal expansion medium is schemed out.In a fluid filled cavity with a piston,the fluid expands when it is heated,and push the piston move outward the cavity.Large displacement achieved under lower temperature rise,due to the thermal expansion coefficient of fluid is much bigger than solid.Fluent(a computational fluid dynamics software),version 6.3,was adopted to simulate the relationship between the output displacement and the temperature rise of the design.Its dynamic mesh model and UDF interface are also adopted.The simulation results show a linear relationship between displacement output and temperature rise in temperature rise range from 0K to 100K.The displacement output is directly with the temperature rise and the volume of the heat cavity,inversely with the cross-sectional area of the piston.The maximum displacement output is 2400um with the heat cavity size of 2.0mm×2.0mm×0.2mm and piston cross-sectional size of 0.1mm×0.2mm.

关键词： MEMS Fluid Electro-thermal Actuator Dynamic Mesh UDF

作者: Liu HUANG Weirong NIE Zhanwen XI

作者单位: School of Mechanical Engineering,Nanjing University of Science & Technology,Nanjing 210094,P.R.China

会议类型: 国际会议

会议名称: The 5th International Conference on Mechanical Engineering and Mechanics(第五届国际机械工程与力学会议)

会议地点: 江苏扬州

会议语种:英文

页码: 554-558

在线出版日期: 2014-08-21（万方平台首次上网日期，不代表论文的发表时间）