An Analysis and Performance Assessment of Double EWMA Control Systems

摘要：

　　Run-to-run(RtR)control technology has received tremendous interest in semiconductor manufacturing industry.Exponentially weighted moving average(EWMA),double EWMA controllers are recognized most popular control schemes for RtR control.In this paper,stability analysis of double EWMA control system is examined in control theory.The novelty of this work is that an iterative method is developed to obtain the best achievable performance of the double EWMA control system.The performance of double EWMA control system is evaluated and the discount factors are retuned.Simulation example is given to show the effectiveness of the proposed method.

关键词： Run-to-run control double exponentially weighted moving average (EWMA) performance assessment best achievable performance (BAP)

作者: MA Mingda Tan Feng Zhang Kai DUAN Guangren

作者单位: Center for Control and Guidance Technology,Harbin Institute of Technology,Harbin 150001

会议类型: 国际会议

会议名称: The 33th Chinese Control Conference第33届中国控制会议

会议地点: 南京

会议语种:英文

页码: 2985-2989

在线出版日期: 2014-07-28（万方平台首次上网日期，不代表论文的发表时间）