Crystal boundary of chemical vapor deposited diamond films
CVD diamond films were synthesized by the chemical vapor deposition method.The crystal boundary was investigated using transmission electron microscopy and scan electron microscopy.The second grains facilitate the more compact film formation.No micro-holes are seen among diamond grains in the films but there are micro-holes in the interface of film/substrate.The second grain and the primary grain would keep the twin relationship of <110>/70.5o.A lot of micro-twins are observed in fivefold twin grains but there is a zone of non twins which is like a strip along the fivefold twin boundary.Two microtwins keep the twin relationship of <110>/70.5o with the fivefold twin matrix.The width and length of microtwins are about 3 nm and 32 nm,respectively.
diamond film chemical vapor deposition (CVD) transmission electron microscopy (TEM)
Yuan-Sheng Huang Cheng-Ping Luo Wan-Qi Qiu
Department of Materials Technology,Jiangmen Polytechnic,Jiangmen 529090,China;College of Mechanical College of Mechanical Engineering,South China University of Technology,Guangzhou,China
国际会议
The 7th International Conference on Electromagnetic Processing of Materials(第七届冶金与材料电磁过程国际大会)
北京
英文
1-5
2012-10-22（万方平台首次上网日期，不代表论文的发表时间）