Nanomachining and Design of Array Sensors on Nanoporous Alumina by Chemical Photolithography

摘要：

　　Chemical photolithography has been ex ploited to fabricate micrometer-sized cantilevers in nanoporous anodized alumina.In particular we concen trated on the self-organization processes due to the syn thesis and modification of film nanoporous anodic alu mina (AAO) surface, which is promising as well as bio sensors.The microstructured surface was obtained by combining anodization of Al-foil and photolithography on thin film of nanoporous Al2O3.Arrays sensors after chemical lithography were determined using atomic force microscopy and scanning electron microscopy.The structure of the porous matrix is not destroyed; al so photolithography process resolution is about 2μm.Preliminary resonance frequency measurements indicate that the microcantilevers can be used directly for sens ing application.

关键词： microcantilever anodic alumina chemical lithography

作者: O.V.Boytsova A.A.Klimenko K.S.Napolskii V.Lebedev A.V.Lukashin

作者单位: Department of Materials Science,Lomonosov Moscow State University,119234,Moscow,Russia;Kurnakov Inst Department of Materials Science,Lomonosov Moscow State University,119234,Moscow,Russia Department of Materials Science,Lomonosov Moscow State University,119234,Moscow,Russia;Department of

会议类型: 国际会议

会议名称: The 12th China-Russia Symposium on Advanced Materials and Technologies(第十二届中俄双边新材料新工艺国际会议)

会议地点: 昆明

会议语种:英文

页码: 18-21

在线出版日期: 2013-11-19（万方平台首次上网日期，不代表论文的发表时间）