Phase Composition,Structure,and Macrostresses of Ferromagnetic Fe95-XZr5NX Films
X-ray difracfions analysis is used to study the evolution of the phase composition, parameters of nanostructure, and mactostresses in soft magnetic Fe95-x Zr5 N x films during their 1-h annealing at 400, 500, and 600℃.The films (char acterized by the different ratio P (at.% N/at.%Zr) =1.1, 1.5, 1.6, 3.7, and 6.6) were prepared by ion-plasma deposition on quartz substrates.During the deposition, depending on the nitrogen content in the films, either the mixture of Zr-and N-enriched amorphous (in terms of X-ray dif fraction) and crystalline (being the (-Fe(N) solid solution) phases or Fe-and N-enriched amor phous phase are formed.During subsequent annea ling, depending on the annealing temperature and nitrogen content in the films, different combinations of crystalline phases are formed; these are (-Fe (N) and Zr(N) (nitrogen solid solutions in iron and zirconium, respectively), (-Fe, Fe4N, Fe2 N, ZrO2.As the annealing temperature increases, high compressive stresses formed in the course of deposi tion change to tensile stresses that are lower in value.
E.N.Sheftel G.Sh.Usmanova O.A.Bannykh
Baikov Institute of Metallurgy and Materials Science,Russian Academy of Sciences,Moscow,Russia
国际会议
The 12th China-Russia Symposium on Advanced Materials and Technologies(第十二届中俄双边新材料新工艺国际会议)
昆明
英文
211-215
2013-11-19（万方平台首次上网日期，不代表论文的发表时间）