Preparation and Wear Behavior of Ni/VC Multilayers Films
Ni/VC multilayers films have been prepared by non-reactive alternating dual-target MF magnetron sputtering.The modulation periods (of all the multiplayers films was controlled via ro tatioinal speed of the substrate holder and the growth rate within the range from 3.7 nm to 24.9 nm.The microstructure and mechanical properties are exam ined by XRD at low (0 ~ 15°) and high (35 ~ 60°) angles, SEM, and nanoindentation.Their wear properties were evaluated using the reciprocating ball-on-plate sliding tests against alumina ball.The worn surfaces after ball-on-plate testing were inspected using the SEM and AFM.The composition of wear track and debris were measured by means of EDS by an EDAX detector.All the films exhibited a well composition modulated structure.The hardness increase with the modulation periods (increases, at (=24.9 nm shows the highest hardness of 17 GPa.These films exhibited excellent wear resistance (K <5 × 10-15 m3/Nm) and a special wear track morphoi ogy.The periods (=24.9 nm have the minimum wear rate of 1.1 × 10-15 m3/Nm.
Ni/VC multilayers films modulation periods no-reactive magnetron sputtering
Xiaojun Zhou Jianhong Yi Jiamin Zhang Xiaoxi Liang Chengzhu Xu Feng Huang
School of Materials Science and Engineering,Kunming University of Science and Technology,Kunming,Yun School of Materials Science and Engineering,Kunming University of Science and Technology,Kunming,Yun Ningbo Institute of Materials Technology and Engineering,Chinese Academy of Sciences,Ningbo,Zhejiang
国际会议
The 12th China-Russia Symposium on Advanced Materials and Technologies(第十二届中俄双边新材料新工艺国际会议)
昆明
英文
390-395
2013-11-19（万方平台首次上网日期，不代表论文的发表时间）