OPTIMAL CUT OF QUARTZ FOR A SURFACE ACOUSTIC WAVE PRESSURE SENSOR WITH NON-UNIFORM PRESSURE LOAD

关键词： surface acoustic wave pressure sensor quartz pressure sensitive coefficients non-uniform pressure load

作者: Yi-yu ZHAO Hong-lang LI Shi-tang HE

作者单位: Laboratory of Acoustical Micro-Electric Mechanics System,Institute of Acoustics,Chinese Academy of Sciences,Beijing,P.R.China,100190

会议类型: 国际会议

会议名称: The 2013 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2013全国压电和声波理论及器件技术研讨会)

会议地点: 长沙

会议语种:英文

页码: 190-192

在线出版日期: 2013-10-25（万方平台首次上网日期，不代表论文的发表时间）