RESONANT PROPERTIES OF THIN FILM BULK ACOUSTIC RESONATOR (FBARs) WITH CONSIDERING THE TWO DIMENSIONAL SIZE EFFECTS

关键词： Thin film bulk acoustic resonator Finite element method Resonant property

作者: Xin-Yi LUO De-Jin HUANG Wen-Liang Zhang Ji WANG

作者单位: School of Mechanical Engineering & Mechanics,Ningbo University,818 Fenghua Road,Ningbo,Zhejiang 315211,China

会议类型: 国际会议

会议名称: The 2013 Symposium on Piezoelectricity,Acoustic Waves and Device Applications(2013全国压电和声波理论及器件技术研讨会)

会议地点: 长沙

会议语种:英文

页码: 216-219

在线出版日期: 2013-10-25（万方平台首次上网日期，不代表论文的发表时间）