Micro-Nano Technology XIV
The collection of 276 peer reviewed papers covers various high-tech fields including electronics, machinery, materials, manufacturing, testing, and disciplines of physical, chemical and biological.The papers are grouped as follow: Chapter 1: Micro and Nano Fabrication; Chapter 2: Micro Sensors; Chapter 3: Micro Actuators; Chapter 4: Microfluidics and Nanofluidics; Chapter 5: Bio MEMS and Applications; Chapter 6: Nanomaterials; Chapter 7: Optical MEMS (MOEMS); Chapter 8: Power MEMS; Chapter 9: Nano Devices and NEMS; Chapter 10: Nanobiology, Nano-Bioinformatics, Nanomedicine; Chapter 11: Packaging, Sealing and Assembling Technologies; Chapter 12: MEMS/Nano Related Research.
electronics machinery materials manufacturing testing, and disciplines of physical chemical and biological
Fei Tang
Trans Tech Publications Ltd Kreuzstrasse 10 CH-8635 Durnten-Zurich Switzerland
国际会议
苏州
英文
407-407
2013-09-09(万方平台首次上网日期,不代表论文的发表时间)