Process Study of Atomic layer deposition Al2O3 in Industry Application for solar cells
The rear surface of multi-silicon has been passivated by Atomic Layer Deposition(ALD) Al2O3 and Plasma Enhanced Chemical Vapor Deposition(PECVD) SiNx.The results of the effective lifetime of the silicon before and after firing show that the thickness of Al2O3 thin films has a significant effect on the passivation quality.The effective lifetime of the silicon can reach up to 40.64μs and show a better passvation quality when the thickness of Al2O3 film is 18nm.Moreover, the impact of spacing of the laser opening-line contact on open-circuit voltage and fill-factor has been furthermore investigated.The cells have a better performance when the spacing of the opening-line is 1.2mm.The result of the local topography of the opening-line contact tested by Scanning Electron Microscopy(SEM) shows that the existing of the void in the interface between Al and Si is the main reason for the bad performance of the cells.
Atomic Layer Deposition Al2O3 Multi-silicon Minority carrier lifetime Laser Opening-line contact
Hong-bo Qiu Hui-qi Li Bang-wu Liu Yang Xia
School of Materials Science and Engineering, Shandong university of science and technology, Qingdao School of Materials Science and Engineering, Shandong university of science and technology, Qingdao Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, C
国际会议
The Eighth China National Conference on Functional Materials and Applications(第八届中国功能材料及其应用学术会议)
哈尔滨
英文
540-545
2013-08-23（万方平台首次上网日期，不代表论文的发表时间）