New Estimation Method of Short Circuit Inductance of Coplanar Probe for On-Wafer Scattering Parameter Measurement
The short impedance standard is the easiest fabricated in Open-Short-Load (OSL) calibration method for on-wafer scattering parameter (S-parameter) measurement.The fabrication and the definition of the other two impedance standard are more questionable.A new extraction method is presented to determine short inductance of coplanar waveguide (CPW) probe.Based on this consideration, other open capacitance and load inductance in OSL calibration method are compensated.The method needs only imperfective OSL impedance calibration kits and another standard offset short.It may improve on-wafer S-parameter accuracy of OSL calibration, which is the same as Thru-Reflect-Line (TRL) calibration.The experimental verification of the new estimation algorithm is given by using the designed and fabricated OSL calibration kit and standard offset short on Al2O3 substrate up to 50 GHz.
on-wafer measurement S-parameter OSL calibration standard offset short short inductance
Huang Hui Liu Xinmeng Lv Xin
School of Information and Electronics,Beijing Institute of Technology No.5 South Zhongguancun Street School of Information and Electronics,Beijing Institute of Technology No.5 South Zhongguancun Street Division of Electronics and Information Technology,National Institute of Metrology No.18,Bei San Hua
国际会议
哈尔滨
英文
9-12
2013-08-16（万方平台首次上网日期，不代表论文的发表时间）