A Fluid Viscosity Sensor with Resonant Trapezoidal Micro Cantilever

摘要：

　　A MEMS (Micro-electro-mechanical systems) fluid viscosity sensor with resonant trapezoidal micro cantilever is introduced in this paper.The fluid viscosity can be measured through the relationship between the fluid viscosity and the quality factor,the resonant frequency of the micro cantilever immersed in the fluid.In order to improve the sensitivity of the viscosity sensor,the geometry of the sensor chip should be carefully designed.Rectangle and trapezoidal micro cantilever chip with different lengths are proposed.The first resonant frequencies and harmonic response analyses of two sensor chips are carried out with ANSYS software.And the quality factors of the sensor chips are calculated through Matlab software.The simulation results show that the resonant frequency and quality factor of trapezoidal cantilever are higher than that of rectangular cantilever with the same length.Therefore,the viscosity sensor with trapezoidal micro cantilever has a better performance.The experimental results show that the viscosity sensor with trapezoidal micro cantilever has a fine accuracy to measure the viscosity of toluene.

关键词： MEMS resonant frequency quality factor trapezoidal micro cantilever viscosity sensor

作者: Longqi Xu Rahman·Hebibul Guiming Zhang Hongyan Wang Libo Zhao Yulong Zhao Zhuangde Jiang Zhigang Liu

作者单位: State Key Laboratory for Manufacturing Systems Engineering, Xian Jiaotong University, 710049 Xian, Xinjiang Vocational & Technical College of Communications, Urumqi 831401, China Shaanxi Institute of Metrology Science, Xian 710065, China Key Laboratory of Thermo-Fluid Science and Engineering of Ministry of Education, Xian Jiaotong Univ

会议类型: 国际会议

会议名称: 2013 International Symposium on Assembly and Manufacturing(2013装配与制造国际专题会议)

会议地点: 西安

会议语种:英文

页码: 131-134

在线出版日期: 2013-07-01（万方平台首次上网日期，不代表论文的发表时间）