MEMS Fluid Density Sensor based on Oscillating Piezoresistive Microcantilever

摘要：

　　The working principle and fabrication process of MEMS density sensor have been studied in this paper.And the density experiments were performed in acetone and silicon oil at temperatures in the range from 20.0 to 50.0 °C under atmospheric pressure.The maximum deviation and the average absolute deviation between the density experimental results and the reference values are ?0.72% and 0.32%,respectively.Because of the small volume of MEMS density sensor,the required fluid volume for experiment is small and doesn’t exceed 100 μL in general.

关键词： MEMS density sensor Microcantilever Resonant frequency Piezoresistive

作者: Guiming Zhang Rahman-Hebitul Libo Zhao Zhuangde Jiang Longqi Xu Yulong Zhao Jiuhong Wang Zhigang Liu

作者单位: State Key Laboratory for Manufacturing Systems Engineering Xian Jiaotong University Xian, 710049, Xinjiang Vocational & Technical College of Communications Urumqi, 831401, China Key Laboratory of Thermo-Fluid Science and Engineering of Ministry of Education Xian Jiaotong Unive

会议类型: 国际会议

会议名称: 2013 International Symposium on Assembly and Manufacturing(2013装配与制造国际专题会议)

会议地点: 西安

会议语种:英文

页码: 167-169

在线出版日期: 2013-07-01（万方平台首次上网日期，不代表论文的发表时间）