Study on the nature frequency of optical excitation quartz tuning fork sensor
The finite element method is used to analyze the nature frequency changing with the structure sizes of MEMS quartz tuning fork.Through the analysis,it can be found that the length and the width of tuning fork arms influence the nature frequency in a large extent.However,the nature frequency has a little influence by changing the gap between the tuning fork arms.So,when using the second order nature frequency,these influencing factors should be taken into consideration.By analyzing the relationship between the nature frequency and structure sizes,the range of tuning fork structure sizes can be acquired,it can ensure the second order nature frequency without disturb by first or third order nature frequency.
Optical excitation Nature frequency Quartz tuning fork Structure sizes
Zhouqiang Zhang Binshan Ma Shuhai Jia
School of mechanical engineering Xian Jiaotong University Xian, China
国际会议
2013 International Symposium on Assembly and Manufacturing(2013装配与制造国际专题会议)
西安
英文
230-234
2013-07-01（万方平台首次上网日期，不代表论文的发表时间）