Decoupling fuzzy sliding mode control of MIMO magnetic suspension stage in XY planar motion

摘要：

　　This paper presents the horizontal control of a novel magnetic suspension stage (MSS) whose travel range is 0.8 mm×0.8 mm in the X and Y axes.Firstly,the dynamic model of MSS in the horizontal is built.And then,based on the three degree-of-freedom (DOF) dy-namic model,a decoupling fuzzy sliding mode controller is designed.Finally,planar positioning experiments show that the presented controller provides a good tracking performance and MSS could achieve planar positioning without quadrant error.

关键词： magnetic suspension stage fuzzy sliding mode control decoupling control

作者: Xiaochao Sheng Dongsheng Zhang Xuesong Mei Tao Tao

作者单位: Department of Mechanical Engineering Xian Jiaotong University Xian, China Department of Mechanical Engineering Xian Jiaotong University Xian, China;State Key Laboratory for

会议类型: 国际会议

会议名称: 2013 International Symposium on Assembly and Manufacturing(2013装配与制造国际专题会议)

会议地点: 西安

会议语种:英文

页码: 321-325

在线出版日期: 2013-07-01（万方平台首次上网日期，不代表论文的发表时间）