A new parallel mechanism for 6-DOF micro displacement and orientation measurement based on optical fiber flexure hinges

摘要：

　　An optical fiber flexure hinge (OFFH) is presented which incorporate sensor with elastic kinematic pair,they are built into a parallel mechanism for in situ 6-DOF micro displacement and orientation measurement.The operation principle is based on bending measurement of flexure hinge itself by curvature optical fiber sensor.The OFFH curvature measurement model is analyzed.The calibration model and method is designed and a 6-DOF micro position and orientation measurement experiment system has been set up.This new sensor is compact,with wide measurement range and small measurement force,which is suitable for multi-dimensional micro operating system in situ micro position and orientation close loop control.

关键词： micro operating system 6-DOF micro displacement and orientation measurement optical fiber flexure hinge curvature optical fiber sensor

作者: Liu Renqiang Ge Q.Jeffrey Gao Feng Liu Pinkuan Yue Yi

作者单位: State Key Laboratory of Mechanical System and Vibration Shanghai JiaoTong University Shanghai, 20024 Zuse Institute Berlin State University of New York at Stony Brook Stony Brook, New York 11794-2300

会议类型: 国际会议

会议名称: 2013 International Symposium on Assembly and Manufacturing(2013装配与制造国际专题会议)

会议地点: 西安

会议语种:英文

页码: 326-329

在线出版日期: 2013-07-01（万方平台首次上网日期，不代表论文的发表时间）