Advantages of MEMS and Its Distinct New Applications

摘要：

　　In this paper, we first discuss the main distinct advantages of MEMS as well as the important differences between MEMS and IC, then some latest research progresses on biomedical, optical and automotive applications of MEMS are briefly reviewed.Finally, possible future developments of MEMS are prospected.

关键词： MEMS IC sensor biomedical optical automotive application

作者: Ying Jian Chen

作者单位: Research Center for Strategic Science and Technology Issues,Institute of Scientific and Technical Information of China,Beijing 100038

会议类型: 国际会议

会议名称: the 2013 2nd International Conference on Metallurgy Technology and Materials(ICMTM2013)(第二届冶金技术与材料国际会议)

会议地点: 香港

会议语种:英文

页码: 205-209

在线出版日期: 2013-06-25（万方平台首次上网日期，不代表论文的发表时间）