Oxygen sensor based on tunable diode laser absorption spectroscopy with a vertical cavity surface-emitting laser

摘要：

　　Oxygen plays a fundamental role in nature and industrial process,the fast on-line oxygen concentration detection is of great significance.Tunable diode laser absorption spectroscopy (TDLAS) is capable high selective,high sensitive,non-intrusive,this technique exploits the diode laser tunable and narrow bandwidth characteristics,by selecting one absorption line of the target gas to avoid interference from other gas and realize oxygen concentration fast on-line detection.In this paper,we use vertical cavity surface-emitting laser (VCSEL) as the light source,adopting the wavelength modulation spectroscopy and the harmonic detection technology to measure the second harmonic signal and realize oxygen concentration fast on-line detection.The detection concentration range between 0.1% to 40% and detection accuracy is 0.1%.

关键词： TDLAS WMS VCSEL Oxygen Sensor

作者: Yanwei Gao Yujun Zhang Dong Chen Ying He Kun You Yi Zhou Jianguo Liu Wenqing Liu

作者单位: Key Laboratony of Environmental Optics and Technology,Chinese Academy of Sciences Hefei,China

会议类型: 国际会议

会议名称: 2013 2nd international Conference on Opto-Electronics Engineering and Materials Eesearch(2013第二届光电工程与材料研究国际会议)(OEMR2013)

会议地点: 郑州

会议语种:英文

页码: 223-227

在线出版日期: 2013-10-19（万方平台首次上网日期，不代表论文的发表时间）