The Accurate Method for Removing Misalignment Errors from Testing Rectangular Optics

摘要：

　　The limitations of current interferogram reduction software with Zernike polynomials in analyzing rectangular interferogram are illuminated.The Zernike polynomials are no longer orthogonal over an rectangular region and have no explicit physical meanings.The reasonable mathematical model for removing translation errors is established based on least squares fitting.The experiment is carried on with a 200mm×75mm aspherical mirror by null-compensation,the misalignment errors can be eliminated from the original phase distribution exactly,thus the accurate surface map is gained,so it provides a guarantee for the superprecision fabrication.

关键词： rectangular optics Zernike polynomial misalignment errors least squares fitting

作者: Zhu Li Xiaokun Wang Song Li

作者单位: Purification Equipment Research Institute of Handan,Handan,056027,China Key Laboratory of Optical System Advanced Manufacturing Technology;Changchun Institute of Optics,Fin

会议类型: 国际会议

会议名称: 2013 2nd international Conference on Opto-Electronics Engineering and Materials Eesearch(2013第二届光电工程与材料研究国际会议)(OEMR2013)

会议地点: 郑州

会议语种:英文

页码: 1431-1434

在线出版日期: 2013-10-19（万方平台首次上网日期，不代表论文的发表时间）