Fabrication and Testing of PDMS Pitch-Variable Gratings Based on Silicon Mold Technology

摘要：

　　A period-variable grating is designed and fabricated in this paper.The PDMS grating is replicated by method of Si mold which is fabricated by MEMS process.The grating is connected with a mechanical system which can change its pitch when a force is applied,so it can extend the grating and change the gratings period.In the diffraction experiment,about 20% extension ratio of the first diffraction order has been obtained,which will generate the change of diffraction angle of 0.096rad.

关键词： PDMS Pitch-variable gratings Silicon Mold Replication

作者: Xinpeng LI Yigui LI Chenchen LUO Wei WANG

作者单位: Key Laboratory for Thin Film and Micro fabrication Technology of Ministry of Education,Research Institute of Micro/Nano Science and Technology,Shanghai Jiao Tong University,Shanghai,China

会议类型: 国际会议

会议名称: 2013 2nd international Conference on Opto-Electronics Engineering and Materials Eesearch(2013第二届光电工程与材料研究国际会议)(OEMR2013)

会议地点: 郑州

会议语种:英文

页码: 1484-1487

在线出版日期: 2013-10-19（万方平台首次上网日期，不代表论文的发表时间）