Study on thermal influence of grinding process on LiTaO3
As a typical multi-functional single crystal material,Lithium tantalate (LiTaO3 or LT) exhibits its excellent electro-optical,pyroelectric and piezoelectric properties,and has now been widely applied into many applications,especially in the telecommunication field.However,the most critical issue in the process is its pyroelectric effect and piezoelectric effect which potentially leads to crack initiation during grinding.Because it is rich in plasticity,LT demands larger specific energy for material removal.As the most machining energy is eventually converted into heat,LT undergoes a rapid rise in temperature during the grinding process,thus highly risks in thermal shock.In order to clarify the thermal influence on the grinding process of LiTaO3,the effects of coolant temperature,diamond grinding wheel geometry and material of substrate are investigated in this research.The experimental results show that the increasing rate of grinding torque (or force) and surface roughness are two major factors dominating the crack initiation during grinding of LT wafers.Via a DOE (design of experiment) analysis,coolant temperature and wheel type stand out as the main factors influencing on the increasing rate and wafer surface roughness.
grinding thermal influence pyroelectric effect piezoelectric effect soft-and-brittle material design of experiments
Wei Hang Libo Zhou Jun Shimizu Julong Yuan
Graduate School of Science and Engineering,Ibaraki University,Hitachi Japan Faculty of Engineering,Ibaraki University,Hitachi Japan Key Laboratory E&M,Zhejiang University of Technology,Hangzhou China
国际会议
杭州
英文
252-257
2013-09-23（万方平台首次上网日期，不代表论文的发表时间）