Optimization of Process Parameters Based on Multi-process and Multi-evaluation Index for Function Ceramics in CMP

摘要：

　　To enhance polishing quality,polishing efficiency and improve the backward state based on single-process way for function ceramics in CMP,a new optimization method of process parameters based on multi-process and multi-evaluation theory is put forward.Firstly,based on experimental data obtained from orthogonal experiment,the optimal combinations of process parameters are got separately in term of surface roughness and material removal rate,which is optimized by Taguchi method in each process.Secondly,combining analysis of evaluation index weight ratio with analysis of variance,the final optimal combination of process parameters is received under the integrated evaluation of surface roughness and material removal rate.Finally,the contrast verification results show that the proposed optimization method is effective.

关键词： Function ceramics CMP Multi-process theory Process optimization

作者: Zihua Hu Jiao Peng Manke Gao

作者单位: School of Mechanical Engineering,Xiangtan University,Xiangtan 411105,China

会议类型: 国际会议

会议名称: 16th International Symposium on Advances in Abrasive Technology(ISAAT2013) in conjunction withthe 17th Chinese Conference of Abrasive Technology(CCAT2013)(第16届国际磨粒技术会议暨第17届全国磨粒技术学术会议)(

会议地点: 杭州

会议语种:英文

页码: 266-272

在线出版日期: 2013-09-23（万方平台首次上网日期，不代表论文的发表时间）