Production and Developing Trends of Gold Alloys Magnetron Sputtering Target
For the reason of outstanding performance and unique character,gold alloys coating materials produced by Magnetron sputtering were used widely and widely.As source material for coating,the quality of gold alloys target has great effects on sputtering technological parameters and performances of coatings.This paper mainly describes the production,application of gold alloys sputtering target as well as the present status and developing trends in the future.
gold alloy magnetron sputtering target technical requirement developing trend
CAO Zhuo ZHANG Qin LI Ying
School of materials and metallurgy,Northeastern University,Shenyang 1100042,China
国际会议
武汉
英文
492-496
2013-06-15（万方平台首次上网日期，不代表论文的发表时间）