A Research on Calibration of Low-Precision MEMS Inertial Sensors
Micro-electromechanical systems (MEMS) are an emerging technology that has the potential for a multitude of uses.MEMS sensors are cost-effective units with small dimensions,but suffer from large random errors compared with their mechanical predecessors.It is hard to have an accurate description of sensor errors because the characteristics of errors are quite different among the MEMS inertial sensors with the same specifications.Installation errors result from the imperfection in welding the MEMS sensor which consists of a triaxial accelerometer and a triaxial gyroscope on a single-chip.Low-precision MEMS inertial sensors exhibit biases,scale factors,and large installation errors.According to the error characteristics of MEMS inertial sensors,a mathematical model was analyzed.The validity of the six-position test was verified by using the correction between the triaxial accelerometer and the triaxial gyroscope on one single-chip.One method to identify the intersection angle among the sensitive axes and the measured vector was analyzed.The test results show that the calibration can effectively correct the bias,scale factor and installation error of MEMS inertial sensors.
MEMS gyroscope MEMS accelerometer Installation errors Six-position test
REN Wei ZHANG Tao ZHANG Hai-yun WANG Lei-gang ZHOU Yong-jie LUAN Meng-kai LIU Hui-feng SHI Jing-wei
Space Center, Tsinghua University, Beijing 100084, China Department of Automation, Tsinghua University, Beijing 100084, China NEC Labs China, Beijing 100084, China
国际会议
the 25th Chinese Control and Decision Conference(第25届中国控制与决策会议)
贵阳
英文
3243-3247
2013-05-01（万方平台首次上网日期，不代表论文的发表时间）