Temperature Compensation of MEMS Based Resonant Sensor with Uniform Mass Sensitivity
High sensitive micro resonators are among the best way for measuring the mass of small entities.The principal of these sensors is based on measuring the resonance frequency shift.Putting the entity on the resonator led to change in the resonance frequency of the resonator,but changing the location of entity on the resonators surface or changing the temperature can cause undesirable shifts in resonance frequency.To tackle these issues,this paper first introduces a new design for folded springs,these springs attached to a platform for target attachment.Second a micro-thermoelectric cooler used to keep the sensor temperature constant.Bi2Te3 and Sb2Tel are selected as the n-type and p-type thermoelectric materials respectively.The ceramic interface in thermoelectric coolers is used as a place to putdirectly mass sensors on it.
Micro resonator Resonance frequency Temperature sensitivity Micro-thermoelectric cooler
MOHAMMAD BAYAT ROUHOLLAH RAJABI HESAMEDIN JOODAKI
Visiting professor of Department of Electrical Engineering, Ashtian Branch, Islamic Azad University, MSc.stu dent in Department of Electrical Engineering, Islamic Azad University,Arak,Iran Visiting professor of Department of Electrical Engineering, Khomein Branch, lslamic Azad University,
国际会议
the 25th Chinese Control and Decision Conference(第25届中国控制与决策会议)
贵阳
英文
4471-4475
2013-05-01（万方平台首次上网日期，不代表论文的发表时间）