High-precision absolute laser interferometer distance measurement system

摘要：

　　With the improvement of precision in various fields,we increase high requirements for measurement accuracy.In this paper,we obtain the interference fringes change information (the distance information) with the help of laser scanning with different frequency.This interference method is an absolute measurement.It does not require the target to move in the direction of measurement.In this paper,we give a detailed analysis of the theory.We have done experiments to compare this new methods results with the results of RENISHAW interferometer.Its improved that the accuracy of distance measurement is 10-4~10-5 relatively.

关键词： Absolute distance metrology high-precision Tunable laser Interferometer Subdivision

作者: Chen-yang Zhang Shao-lan Zhu Hao-dong He Bing Li Chen-yang Zhang Shao-lan Zhu Bing Li

作者单位: Xian Institute of Optics and Precision Mechanics of Chinese Academy of Sciences Xian,710119,China Garduate University Chinese Academy of Sciences Beijing,10039,China

会议类型: 国际会议

会议名称: 2013 2nd International Conference on Computer Science and Electronics Engineering(ICCSEE2013)(2013年第二届计算机科学与电子工程国际会议)

会议地点: 杭州

会议语种:英文

页码: 274-276

在线出版日期: 2013-03-22（万方平台首次上网日期，不代表论文的发表时间）