Research on Precision Experimental Table for CO2 Laser Machining Microfluidic Chip

摘要：

　　In order to experiment study of CO2 laser machining polymer-based microfluidic chip, a laser micro-processing precision experimental table was built.A servo feed system directly driven by linear motor was designed to achieve high speed and high position accuracy.DuaI-CPU open CNC system used Industrial Personal Computer(IPC) as master computer and PMAC controller as slave computer was constructed to ensure system real-time control.In order to increase position accuracy of precision table, a forecast model of the linear motor position error was put forward based on LSSVM and error compensation was processed.Research results indicated that the use of radial basis function of the LSSVM could improve linear motor position accuracy.

关键词： CO2 laser micromachining linear motor PMAC LSSVM location accuracy error compensation

作者: Xiang Hengfu Zhang Lijun

作者单位: China University of Petroleum, Qingdao, China

会议类型: 国际会议

会议名称: 2013International Conference on Energy Engineering and Environmental Engineering(2013年能源工程与环境工程国际会议)(ICEEEE2013)

会议地点: 杭州

会议语种:英文

页码: 1002-1006

在线出版日期: 2013-01-18（万方平台首次上网日期，不代表论文的发表时间）