Progress and Research Status of CO2 Laser Machining Polymer Microfluidic Chips

摘要：

　　CO2 laser rapidly patterning microfluidic chips on polymer substrate with direct writing ablation had attracted many experts from domestic and foreign in resent years.This method had features of flexible, rapid, easily controllable and high efficient, and was regarded as the most potentialized fabrication method to improve the development of microfluidic systems.This paper systematically reviewed polymer substrate materials, the mechanism of laser and material,fabrication models and factors influenced the fabrication process, as well as the influence on microfluidic chips fabrication quality by laser process parameters.Moreover, the existent problems and possible resolutions based on the mechanisms of interactions between laser and materials was analyzed.

关键词： CO2 laser machining surface quality microfluidic chip laser ablation PMMA polymer

作者: Xiang Hengfu Zhang Lijun

作者单位: China University of Petroleum, Qingdao, China

会议类型: 国际会议

会议名称: 2013International Conference on Energy Engineering and Environmental Engineering(2013年能源工程与环境工程国际会议)(ICEEEE2013)

会议地点: 杭州

会议语种:英文

页码: 1007-1013

在线出版日期: 2013-01-18（万方平台首次上网日期，不代表论文的发表时间）