Mechanical analysis of vibrating-beam resonantor accelerometer
Based on the change of the length for the vibrating-beam,the potential energy stored in the system and the force function are presented.Then the sensor parameters and nonlinear factor are defined and calculated.From this,the mechanical parameters of the vibrating beam can be modeled,and the formulae of the frequency is derived as the function of the external axial acceleration and amplitude,and the mode of a single-degree elastic oscillator is set up.These results are the theoretical bases of developing the vibrating-beam-type accelerometer.
accelerometer vibrating-beam resonator frequency nonlinear vibration
JIA Yu-bin
Institute of Microelectronics, Peking university, Beijing, China, 100871
国际会议
太原
英文
373-376
2013-01-13（万方平台首次上网日期，不代表论文的发表时间）