Thermal Heating Effect on Structural and Mechanical Property of Diamond-like Carbon Film Prepared by Filtered Cathodic Arc
Diamond-like carbon (DLC) films were deposited on magnetic recording head by Filtered Cathodic Arc (FCA) technique and a-Si base material was ion beam deposited as seed layer.To investigate the thermal stability of stack film,repeated cycle thermal heating at 200 ℃ was employed.Raman spectroscopy and nanoindenter (Hysitron) were performed to understand film structure and mechanical property as a function of thermal heating conditions.The roles of heating in material composition and wear behavior of DLC films are discussed.The Raman spectra revealed that G position,FWHM of G peak and Id/Ig change as with increasing heating cycle which agreed well with wear depth measured.With these results suggesting DLC film degraded with repeated heating at 200 ℃.
Diamond-like carbon Raman spectroscopy wear thermal heating
Nattaporn Khamnaulthong Krisda Siangchaew Pichet Limsuwan
Department of Physics,Faculty of Science,King Mongkuts University of Technology Thonburi,Bangkok,10 Western Digital(Thailand)Co.Ltd,Ayutthaya,13160,Thailand Department of Physics,Faculty of Science,King Mongkuts University of Technology Thonburi,Bangkok,10
国际会议
济南
英文
82-85
2012-12-29（万方平台首次上网日期，不代表论文的发表时间）