The Use of Porous Silicon for Nanostructuring of Functional Metal Layers for MEMS

摘要：

　　The results of studies relating to the use of porous silicon as the basis for the creation of nanostructured getter layers for MEMS are presented.New technical solutions,in which the porous silicon with pores of micro-and nanometer range is used as a matrix for the deposition of reactive metals or metal alloys,were developed.The research results can be used to create getters for MEMS,as well as in other areas which require the creation of structures with a developed surface.

关键词： nanostructuring metal layers porous silicon MEMS getters

作者: Sergei Timoshenkov Dahir Gaev Anton Boyko

作者单位: National Research University of Electronic Technology,Moscow,Russia Kabardino-Balkarian State University,Nalchik,Russia

会议类型: 国际会议

会议名称: 2012 2nd International conference on Machinery Electronics and Control Engineering (2012年第二届国际机械电子与控制工程会议(ICMECE 2012))

会议地点: 济南

会议语种:英文

页码: 108-111

在线出版日期: 2012-12-29（万方平台首次上网日期，不代表论文的发表时间）