Research on Calibration of Semiconductor DC Tiny Current Source
Semiconductor DC tiny current source is the equipments that can produce pA tiny current level.It is widely used in aerospace engineering,semiconductor circuit testing,new nano materials research,analysis science of development of life,etc with its unique advantages of high sensitivity and resolution in producing tiny current signal.It is a new challenge to calibrate these precise semiconductor DC tiny current sources in metrology.This passage did detailed studies on the domestic and foreign existing calibration methods,then developed a high resistance box,built semiconductor DC tiny current source calibration device,and developed automatic calibration software.In this paper,also the uncertainties of the calibration results had analyzed to fulfill the calibration of this tiny current source.
Tiny current source Calibration Calibrating system Calibration software Uncertainties
Liu Chong Yu Lihong Xu Yingchun
No.8,TongjiNanlu,Yizhuang Economic & Technological Development Area,Beijing,China No.1,Jinjilu,Guilin University of Electronics Technology,Guilin,China
国际会议
济南
英文
638-642
2012-12-29（万方平台首次上网日期，不代表论文的发表时间）