Design and Simulation of Pressure Sensor for Ocean Depth Measurements
MEMS (Micro Electro Mechanical System) are usually defined as highly miniaturized devices combining both electrical and mechanical components that are fabricated using integrated circuit batch processing techniques.Pressure sensors are usually manufactured using square or circular diaphragms of constant thickness in the order of few microns.In this work,a comparison between circular diaphragm and square diaphragm indicates that square diaphragm has better perspectives.A new method for designing diaphragm of the Piezoresistive pressure sensor for linearity over a wide pressure range (approximately double) is designed,simulated and compared with existing single diaphragm design with respect to diaphragm deflection and sensor output voltage.
Piezoresistive Pressure Sensor MEMS Single diaphragm Double diaphragm Sensitivity Linearity
Suja K J Bhanu Pratap Chaudhary Rama Komaragiri
Department of Electronics and Communication Engineering,National Institute of Technology,Calicut,Kerala,India
国际会议
济南
英文
666-670
2012-12-29（万方平台首次上网日期，不代表论文的发表时间）