Structure Design of A Novel Triaxial Micro-accelerometer

摘要：

　　This paper reports a new capacitive triaxial micro-accelerometer which consists of four identical dual beam-mass structure.Considering the temperature characteristic,beam consistency and zero bias and other factors of the accelerometer,the arrangement and anchor position,as well as matching capacitor are studied using ANSYS software to complete the design of the overall structure of the accelerometer.The research methed having been uesd is significant for optimizing structure of the micro-accelerometer.

关键词： triaxial micro-accelerometer arrangement anchor matching capacitor

作者: Yang Fan Yuan Ye Ma Zhongyi Liu Xue

作者单位: School of Mechatronics Engineering and Automation, National University of Defense Technology,Changsh Shenyang Military Representative Office of General Armaments Department, Shenyang 110000,China

会议类型: 国际会议

会议名称: 2nd International Conference on Advanced Materials and Engineering Materials(第二届先进材料与工程材料国际会议)(ICAMEM2012)

会议地点: 北京

会议语种:英文

页码: 745-749

在线出版日期: 2012-12-16（万方平台首次上网日期，不代表论文的发表时间）