Optimization of electrode structures of PZT acoustic energy harvesters fabricated on SOI substrate
This paper reports on the power generation performances of a PZT microelectromechanical system (MEMS) acoustic energy harvester having dual top electrodes to utilize the different polarizations of charges on the surface of a vibrating PZT diaphragm at first resonance.The PZT acoustic energy harvester was fabricated on a silicon-on-insulator (SOI) substrate,and had a diaphragm with a diameter of 2 mm consisting of Al (0.1 μm)/PZT (1 μm)/Pt (0.1 μm)/Ti (0.1 μm)/Si (1.0 μm)/SiO2 (0.5 μm),and the diaphragm vibrations were excited by sound pressure.The top Al electrodes independently cover the peripheral surface and the central surface of the PZT diaphragm.The peripheral energy harvester generated a power of 7.83 × 10-11 W,and the central energy harvester generated a power of 7.18 × 10-11 W at an SPL of 100 dB at 9.95 kHz.
Energy Harvester PZT SOI substrate
Kazuki Tomii Shungo Tomioka Satoshi lizumi Kyouhei Tsujimoto Yusuke Uchida Tomohiro Matsuda Saori Hagiwara Shuntaro Miyake Yasushiro Nishioka
Department of Precision Machinery, College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi, Chiba 274-8501, Japan
国际会议
北京
英文
933-936
2012-12-16（万方平台首次上网日期，不代表论文的发表时间）