Effect of Heat-treatment on Wear Performance of Nanolayer WN/TiN Coating

摘要：

　　A nanolayer WN/TiN coating was grown using an industrial-scale four-target reactive sputtering system.Effects of heat treatment on fundamental properties and wear performance of the nanolayer coating were studied.For comparison,a single layer TiN was used as a reference.Characterization was carried out using a nano hardness tester,GDOES,XRD and SEM.Wear performance was evaluated using an SRV(R) wear tester.It was found that the as-deposited nanolayer WN/TiN coating showed relatively high nano hardness and wear resistance as compared with the single layer TiN.The heat treatment resulted in performance degradation of the nanolayer coating.After 600 ℃ heat-treatment,the nanolayer coating showed very poor mechanical performance.

关键词： Nanolayer Coating WN TiN Heat-treatment Wear

作者: S.H.YAO Y.L.SU W.H.KAO

作者单位: Chang Jung Christian University, Kway Jen, Tainan 71101, Taiwan National Cheng Kung University, Department of Mechanical Engineering, Tainan 70101, Taiwan Chienkuo Technology University, Institute of Mechatronoptic Systems, Zhanghua 50094, Taiwan

会议类型: 国际会议

会议名称: 3rd International Conference on Frontiers of Manufacturing and Design Science(第三届制造与设计科学前沿国际会议(ICFMD))

会议地点: 香港

会议语种:英文

页码: 283-287

在线出版日期: 2012-12-11（万方平台首次上网日期，不代表论文的发表时间）