Study and Simulation of the Model of Stability Measurement for Integrated Semiconductor Equipment
Performance analysis and capacity prediction of integrated semiconductor equipment is a very difficult task,it is a effective way to solve this problem by setting up a model of equipment performance measurement.This paper details the composition and related operation principle of parallel integrated semiconductor equipment.This paper also deriving a set of stability measurement model,we call it Throughput Model,for integrated semiconductor equipment according to its operation principle,which reflect the relationship between stability and output error.The model can effectively calculate the stability of equipment and help system design.
Parallel Integrated Semiconductor Equipment Model of Stability Simulation
Xue Fang Wang Haifei
Department of Physics and Electrical Engineering Handan College Handan 056005, China
国际会议
太原
英文
1764-1766
2012-12-08（万方平台首次上网日期，不代表论文的发表时间）