FABRICATION OF BULK ACOUSTIC WAVE RESONATOR BASED ON ALN THIN FILM

关键词： Bulk acoustic wave (BAW) resonator AlN C-axis oriented Cracking

作者: Jie YANG Xiang-quan JIAO Rui ZHANG Hui ZHONG Yu SHI

作者单位: State Key Laboratory of Electronic Thin Films and integrated Devices, University of Electronic Science and technology of China, Chengdu 610054

会议类型: 国际会议

会议名称: The 2012 Symposium on Piezoelectricity, Acoustic waves and Devixe Applications (2012全国压电和声波理论及器件技术研讨会(SPAWDA 2012))

会议地点: 上海

会议语种:英文

页码: 191-194

在线出版日期: 2012-11-23（万方平台首次上网日期，不代表论文的发表时间）